Micro Electro-Mechanical Systems (MEMS)
Application of MEMS techniques to viable EM sensor building blocks, e.g. RF devices, micro mirror arrays, etc.
| Proposed Research
Topics |
Micro Electro-Mechanical Systems (MEMS) |
| Military Need | |
| HF | |
| VHF/UHF | |
| m-wave |
|
| mm-wave | |
| sub-mm | |
| IR | |
| VU/Vis | |
| Objectives |
Application of MEMS techniques to viable EM sensor building blocks, e.g. RF devices, micro mirror arrays, etc. |